There are various vacuum processes used to create thin film deposition (coatings) of metal, alloys and non-metals. This can be achieved through mechanical, electromechanical or thermodynamic means. Kamet’s mineral insulated vacuum heaters have a broad range of application in deposition systems.
In physical vapour deposition (PVD), metals and alloys are evaporated from a source and the atoms, ions or molecules are deposited onto the substrate surface using thermal evaporation, sputtering or electron beam (e-beam). The choice of technique depends on the specific type of material being deposited.
Kamet wafer heaters are an important component in magnetron sputtering. We are also able to customize our substrate heaters (otherwise known as chuck heaters or sample heaters) to meet specific process requirements. For example, casting a mineral insulated heating element in the heating chuck for PVD surfaces.
In fact, Kamet’s strength lies in offering extremely accurate, customized solutions tailored to our clients specific high-end needs in the semiconductor industry. For such projects we also work closely with the specialists at our partner company, ARi who supply our MI heaters.
More about our work for the semiconconductor industry you can read here. If you have any questions or like to talk to us about your application. You can contact us via this form.
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