Mineral insulated cable, pt100 sensors, thermocouple wire

Mineral insulated Heating solutions for semiconductor industry

Providing mineral insulated heating solutions for the semiconductor industry is a known area of expertise for Kamet Heating. We offer, amongst other things, heater cable and custom micro heaters to various semiconductor companies in Europe. Our aim is to provide reliable and high-end solutions in a market where nanometers count.

Challenges semiconductor applications

In general, heating in semiconductor applications demands a great challenge when it comes to temperature and space. The operating temperatures are often high and fluctuations in output are not desirable when process stability is key in, for example, wafer production or lithography processes. Therefore, mineral insulated heaters are a very good solution to improve the temperature uniformity, even in vacuum environments.

Our heaters can also be applied in sputtering systems. Sputtering is used to deposit thin film layers in semiconductor devices and other nanotechnology products. Our custom made solutions integrate the mineral insulated heaters in the desired end product.

The heating solutions by Kamet are suitable for the following high-end applications in the semiconductor industry:

Developing tailored products and solutions

Microheaters can also be used in sputtering systems in which thin film layers are deposited in semiconductor devices and other nanotechnology products. Our custom made solutions integrate the mineral insulated heaters in the desired end product.

Together with our partners ARi Industries and Okazaki Manufacturing Company, Kamet has a great expertise in developing tailored solutions. It all start with translating the customer’s needs into a functional design of the heater. Our engineers have years of experience in developing the right heater for complex and harsh environments. Kamet will help you during the entire process: from initial design to development and finally testing.

One of the reasons that Kamet Heating is supplying to Europe’s leading semiconductor companies is because we actively support the development of new and custom-made heating products.

Knowledge base


Why are mineral insulated heaters used in wafer production?

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What kind of Mineral Insulated heaters are available?

There are different mineral insulated heaters. For example: Micro heaters, heat tracing elements, cartridge heaters, plate heaters, radiant heaters, tubular heaters, cathode heaters.
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What temperatures can Mineral Insulated heaters reach?

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Do you have a question about our heater solutions?

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