Mineral insulated heating solutions for semiconductor industry
Providing mineral insulated heating solutions for the semiconductor industry is a known area of expertise for Kamet Heating. We offer, amongst other things, heater cable and custom microheaters to various semiconductor companies in Europe. Our aim is to provide reliable and high-end solutions in a market where nanometers count.
Heating solutions for semiconductor industry
In general, heating in semiconductor applications demands a great challenge when it comes to temperature and space. The operating temperatures are often high and fluctuations in output are not desirable when process stability is key in, for example, for particle deposition on semiconductor wafers or lithography processes. Therefore, mineral insulated heaters are a very good solution to improve the temperature uniformity, even in vacuum environments.
Our heaters can also be applied in sputtering systems. Sputtering is used to deposit thin film layers in semiconductor devices and other nanotechnology products. Our custom made solutions integrate the mineral insulated heaters in the desired end product.
The heating solutions by Kamet are suitable for the following high-end applications in the semiconductor industry:
- Physical Vapor Deposition (PVD)
- Rapid thermal processing (RTP) and rapid thermal annealing (RTA)
- Chemical Vapor Deposition (CVD)
- (Photo) Lithography
- Atomic Layer Deposition (ALD)
- Ion implantation
- Vaporizer systems
- Plasma Enhanced Chemical Vapor Deposition (PECVD)
- Pulsed Laser Deposition (PLD)
- Sputtering
MI products and solutions
Micro heaters
Micro heaters can also be used in sputtering systems in which thin film layers are deposited in semiconductor devices and other nanotechnology products. MI micro heaters are versatile, capable of withstanding harsh conditions including high temperatures and extreme environments of vacuum or high pressure. Designed for flexibility, they can be custom shaped to fit intricate spaces, ensuring optimal performance in industries such as semiconductor. Our expertise and collaboration with leading producers enable us to offer customized heating solutions, reinforcing our commitment to quality and innovation in meeting the specific needs of our clients.
Wafer Heaters
Our wafer heaters are designed to cater to the specific demands of the semiconductor industry, providing precise temperature control crucial for various manufacturing processes. These heaters are built to withstand high temperatures, up to 1000°C, ensuring durability and reliability. We offer a range of configurations to perfectly align with your application requirements, promoting optimal thermal performance.
For detailed specifications and to explore the full range of our wafer heater solutions, please visit our product page for more information.
Read more about heating solutions for semiconductor
(Photo) Lithography for semiconductor applications
Heating and temperature solutions for rapid thermal processing (RTP) and rapid thermal annealing (RTA)
Heating solutions for Physical Vapour Deposition (PVD) in semiconductor applications
Heating solutions for Chemical Vapor Deposition (CVD) in semiconductor applications
Do you have a question about our heating solutions?
Thermal challenges can be complex. Contact our in-house experts today, and together you can find the best MI heating solution for your needs.