There are various vacuum deposition processes used to create thin film deposition (coatings) of metal, alloys and non-metals. This can be achieved through mechanical, electromechanical or thermodynamic means. Kamet’s mineral insulated heating elements have a broad range of application in deposition systems.
Chemical vapor deposition is a vacuum thin film deposition process using thermally induced chemical reactions on the substrate surface. The process varies slightly depending on the material used.
Adjusting pressure, temperature and duration influences the thickness of the deposited layer. In fact there are a number of sub-categories of CVD processes depending on such variables. These include:
CVD can be used for thin-film layers on a wide range of materials such as glass, ceramics, metals and metal alloys at a fairly high deposition rate. An advantage of CVD over Physical Vapour Deposition (PVD) is that it can be used to create uniform coats even on complex shapes. In fact this characteristic combined with the high purity of CVD deposition, make it very useful in sensitive nanotechnology processes. It is easy to remove impurities from gaseous precursors during chemical vapor deposition. This is another advantage for nanotechnology applications.
On the downside, CVD precursors can be highly toxic, explosive or corrosive and the residual products are a hazardous waste. Furthermore some of the precursors can be expensive.
There are multiple ways to heat up the processes in CVD coating applications, one of the most important and widely used is resistive heating. This is Kamet’s area of expertise, with a range of high quality mineral insulated heating elements well suited for CVD applications.
Due to the use of CVD for nanotechnologies, thermal performance is critical to control thin film deposition and ensure quality. At Kamet we have the know-how to design bespoke heating systems that meet the challenges of all the different CVD processes. Our high temperature precision heaters can be combined with leading-edge temperature sensors thus ensuring the thermal uniformity that is so crucial to these processes.
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